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TIA Microwave Plasma Torch EM Modeling

Consulting & Reimplementation Available: This model was originally implemented in PLASIMO during my PhD. We can discuss how to implement it in another plasma simulation software upon request, or adapt your own model, add new chemistry, or create verification workflows to test it. Contact me to discuss.

Disclaimer: PLASIMO and COMSOL Multiphysics® are not affiliated with Deep Why and require the client to hold their own licenses.

The Torche à Injection Axiale (TIA) is a microwave plasma torch widely used in various industrial and scientific applications. Properly coupling microwave energy into the plasma is critical for efficient operation and stability.

In this study, we investigated the electromagnetic (EM) characteristics of the TIA across different operating configurations: closed, semi-open, and open. We analyze power absorption, reflection, and transmission as a function of geometrical parameters, providing detailed insights into the power coupling mechanisms.

TIA Torch Geometry Schematic
Figure 1: Schematic geometry of the TIA (Torche à Injection Axiale) microwave plasma torch showing the coaxial design.

Understanding Closed, Semi-Open, and Open Configurations

To understand the boundary conditions and their impact on electromagnetic wave propagation, we simulated three primary configurations representing how the torch is surrounded:

TIA Open, Semi-Open, and Closed Configurations Geometry
Figure 2: Geometrical representations of the TIA under closed, semi-open, and open configurations.

Power Coupling vs. Length

The length of the plasma and the geometry of the surrounding setup heavily influence the fraction of microwave power that is absorbed (A), reflected (R), or transmitted. The following figures show the power coupling efficiency as a function of length for closed, semi-open, and open configurations.

Power vs Length Closed Configuration
Power absorption and reflection vs length in the closed configuration.
Power vs Length Semi-Open Configuration
Power absorption and reflection vs length in the semi-open configuration.
Power vs Length Open Configuration
Power characteristics as a function of length in the open configuration. Note the transmission components.

Dependency on Radius and Density

Besides the length, the radial dimensions and electron density distribution significantly affect the impedance matching of the plasma loaded resonator. Analysis over these parameters allows us to optimize the operational sweet spots for the TIA device.

Power vs Radius Closed Configuration
Dependency of power coupling on the plasma radius (closed configuration).
Power vs Electron Density Open Configuration
Coupling efficiency variations against varying peak electron densities in the open configuration.

Bibliography

  • Jimenez-Diaz M. (2011). Modelling of microwave induced plasmas: the interplay between electromagnetism, plasma chemistry and transport. PhD Thesis, Eindhoven University of Technology (TU/e). [ read thesis pdf ]